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Plasmatechnology
EMICON SA
EMICON SA for process control and quality assurance in industrial plants and production lines

The EMICON SA systems of PLASUS GmbH ( www.plasus.de ) are especially designed for process control and quality assurance in industrial plants and production lines. Essential hardware components and firmware modules were developed and manufactured by IfU Diagnostic Systems GmbH on behalf of and in cooperation with PLASUS GmbH. The integrated processor unit enables 24/7 stand-alone process and easy integration of the system e.g. via LAN or Profibus/ Profinet into an existing plant control system.
Applications:

» Process control in reactive sputtering processes (gas flow/power)
» Monitoring of the process stability
» Endpoint determination in plasma etching processes
» Ion density control in HIPIMS processes
» Detection and monitoring of plasma contamination
» Spatially resolved process monitoring of large area applications
Features:

» stand-alone process (24/7)
» process control with set-point function and PID control function
» multi-channel systems for spatially resolved measurements
» voltage inputs for external sensor signals (λ probe, target voltage)
» digital and analog inputs and outputs for system integration
» PROFIBUS/PROFINET and LAN interface for plant integration
» configuration via LAN with Windows software
+++ The EMICON SA system of PLASUS GmbH is exclusively distributed by PLASUS GmbH
( www.plasus.de ). +++